发明名称 |
THERMALLY INSULATED RESISTIVE RANDOM ACCESS MEMORY |
摘要 |
An embodiment includes a resistive random access memory (RRAM) comprising: a top electrode portion and a bottom electrode portion; and an oxide layer between the top and bottom electrode portions; wherein (a) a conductive filament is within the oxide layer and is adjacent the top electrode portion, (b) the oxide layer includes oxide layer sidewalls, (c) a vertical axis intersects the oxide layer and the top and bottom electrode portions and is parallel to the oxide layer sidewalls, and (d) a void, which includes air, is adjacent the oxide layer sidewalls. Other embodiments are described herein. |
申请公布号 |
WO2017052583(A1) |
申请公布日期 |
2017.03.30 |
申请号 |
WO2015US52198 |
申请日期 |
2015.09.25 |
申请人 |
INTEL CORPORATION |
发明人 |
KARPOV, Elijah V.;SHAH, Uday;MAJHI, Prashant;MUKHERJEE, Niloy;PILLARISETTY, Ravi |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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