Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

摘要

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

主权项

1. A MEMS structure comprising:
a first set of wires on a substrate, comprising fixed actuator electrodes and a contact; a MEMS beam comprising a second set of wires above the first set of wires; and an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation, and wherein the array of mini-bumps are in direct contact with and extend from insulator material forming an underside of the MEMS beam.