Controlled fluid delivery in a microelectronic package

摘要

A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel the flow of liquids to the die for biological sensor type applications. The defined paths may comprise a wetting coating that has an affinity to fluids. Similarity, the defined paths may comprise a dewetting coating the tend to repel fluid surrounding the paths.

主权项

1. A method for forming virtual fluidic channels on a substrate to channel a fluid to a die, comprising:
providing a die on a substrate, the die including one or more fluidic circuits; patterning a coating on the substrate to define a fluid path from an edge of the substrate to the die: patterning a coating on a cover corresponding to the fluid flow path; positioning a spacer on the substrate; and placing the cover over the substrate and the spacer, wherein the coatings define a virtual fluidic path to channel a fluid to the die.