Method of fabricating wavelength conversion device

摘要

Disclosed is a method for fabricating a wavelength conversion device that is capable of suppressing unintended and random polarization reversal due to heating thereby achieving higher wavelength conversion efficiency. The method includes: forming an insulating layer on one place of a crystal substrate naturally and uniformly polarized in a thickness direction; forming an insulating layer pattern with line-and-space by photolithography; then supplying conductive fluid to both planes of the crystal substrate to apply voltage to the crystal substrate, thereby a wavelength conversion device that is periodically polarization-reversed is fabricated. When temperature of the crystal substrate decreases after heating, an ionizer supplies ions to a surface of the crystal substrate, negative ions collect on +z plane, and positive ion collect on −z plane, thereby unintended and random polarization reversal is suppressed.

主权项

1. A method of fabricating a wavelength conversion device, the device being fabricated from a crystal substrate and formed from a ferroelectric crystal demonstrating a non-linear optical effect, the method comprising:
heating the crystal substrate; suppressing a polarization reversal on a surface of the crystal substrate in which natural polarization occurs when temperature of the crystal substrate being changing due to the heating; and forming a structure that is periodically polarization-reversed in the direction perpendicular to a thickness direction of the crystal substrate on the surface of the crystal substrate, wherein the suppressing the polarization reversal is carried out by collecting, on the surface of the crystal substrate, ions having a polarity different from a polarity on a region of the surface of the crystal substrate in which natural polarization occurs, the surface being to be periodically polarization-reserved.