| 摘要 |
Provided are: a hard lubricating coating film which is hard and has wear resistance; and a hard lubricating coating film-covered tool. A hard coating film (10), which is hard and has wear resistance, and a drill (12) can be obtained by alternately forming and laminating two or more layers A (24) composed of a carboxide, oxynitride or oxycarbonitride of (CraMobWcVdBe)1-x-y-zCxNyOz and two or more layers B (25) composed of Si(1-f)Nf. In this connection, the atomic ratios a-e, x, y, z and (x + y + z) of the layers A (24) are within predetermined ranges; the atomic ratio f of the layers B (25) satisfies 0.3 ≤ f ≤ 0.6; the film thickness (D1) of the layers A (24) is within the range from 2 nm to 500 nm (inclusive); the film thickness (D2) of the layers B (25) is within the range from 1 nm to 20 nm (inclusive); and the total film thickness (D) is within the range from 0.1 μm to 10.0 μm (inclusive). |
