| 摘要 |
PROBLEM TO BE SOLVED: To provide a signal processor which sets proper smoothing conditions in spite of changes in the kind of a material and the shape of a pattern, etc., and a charged particle beam device.SOLUTION: There are provided: a signal processor which performs smoothing processing on a detection signal acquired by a charged particle beam device, the signal processor measuring a pattern size or detecting an edge position using a plurality of signal waveforms obtained when smoothing coefficients of the smoothing processing are changed, and selecting a smoothing coefficient with which a difference between pattern-size measurement results or a difference between detection positions of an edge before and after the smoothing coefficients are changed becomes a minimum value, a smoothing coefficient indicative of a value closest to the minimum value, or a smoothing coefficient equal to or less than a predetermined value; and the charged particle beam device. |
