发明名称 GETTER PUMPING SYSTEM
摘要 A getter pumping system for linear accelerators or high-volume environments, is described. A plurality of getter cartridges having a linear support and a plurality of linear heaters are connected in a high-density configuration to a wall that has a surface area of at least 0.5 m2.
申请公布号 US2017076925(A1) 申请公布日期 2017.03.16
申请号 US201515308057 申请日期 2015.06.24
申请人 SAES GETTERS S.P.A. 发明人 BONUCCI Antonio;MANINI Paolo;SIVIERO Fabrizio;SONATO Piergiorgio
分类号 H01J41/12 主分类号 H01J41/12
代理机构 代理人
主权项 1. A getter pumping system comprising a wall portion, a plurality of getter cartridges having a linear support connected to said wall portion and a plurality of linear heaters, wherein said wall portion has a surface area of at least 0.5 m2, the density of said getter cartridges is comprised between 20 and 2500 cartridges per square meter and the density of said linear heaters is comprised between 20 and 5000 heaters per square meter.
地址 Lainate IT