ELECTROMECHANICAL SYSTEMS DEVICE WITH SEGMENTED ELECTRODES AND THIN FILM TRANSISTORS FOR INCREASING STABLE RANGE

摘要

This disclosure provides systems, methods, and apparatus for electromechanical systems (EMS) devices with a plurality of electrically isolated electrode segments each connected to a distinct thin film transistor (TFT), where a plurality of TFTs drive the EMS device by applying a common voltage to the plurality of electrode segments. The plurality of TFTs can be configured to allow each electrode segment to have its own voltage during actuation. The EMS device can include a substrate, a stationary electrode over the substrate, and a movable electrode over the stationary electrode with a gap defined between the stationary electrode and the movable electrode. At least one of the stationary electrode and the movable electrode includes the plurality of electrode segments. The plurality of TFTs and the plurality of electrode segments can increase the stable range of the EMS device.

主权项

1. An electromechanical systems (EMS) device comprising:
a substrate; a stationary electrode over the substrate; a movable electrode over the stationary electrode with a gap between the movable electrode and the stationary electrode, wherein at least one of the stationary electrode and the movable electrode includes a plurality of electrically isolated electrode segments; and a plurality of thin film transistors (TFTs), each of the TFTs connected to and corresponding to a distinct one of the plurality of electrode segments, the plurality of TFTs configured to drive the movable electrode to two or more positions across the gap by a common voltage.