MEMS DEVICES ON FLEXIBLE SUBSTRATE

摘要

A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.

主权项

1. A flexible film, comprising:
a first metallic layer having a first outer major surface and a first inner major surface; a first polymer layer adjacent the first metallic layer, the first inner major surface facing the first polymer layer; a second metallic layer having a second outer major surface and a second inner major surface, the second metallic layer disposed adjacent the first polymer layer opposite the first metallic layer, the second inner major surface facing the first polymer layer,wherein the flexible film includes one or more MEMS elements, each MEMS element including:
a first metallic region in the first metallic layer, the first metallic region including a first perforation; a first voided region in the first polymer layer; and a second metallic region in the second metallic layer, the second metallic region including a portion that is capable of a movement relative to the first metallic region.