| 摘要 |
This target storage device may be provided with: a tank for storing a target that generates extreme ultraviolet light when irradiated with laser light; a heater, which is connected to the tank, and heats the tank; and a radiation member that is disposed such that at least a part of the tank, to which the heater is connected, is covered with the radiation member, said radiation member reflecting heat radiation from the tank and the heater toward the tank. |
