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发明名称
MANUFACTURE OF ACCELERATION SENSOR
摘要
申请公布号
JPH06331650(A)
申请公布日期
1994.12.02
申请号
JP19930139556
申请日期
1993.05.18
申请人
MURATA MFG CO LTD
发明人
KONAKA YOSHIHIRO
分类号
C23F4/00;G01P15/12;G01P15/125;H01L29/84;(IPC1-7):G01P15/12
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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