发明名称 |
MANUFACTURING METHOD FOR SEAMLESS MOLD |
摘要 |
A seamless mold manufacturing method of the invention is a seamless mold manufacturing method having the steps of forming a thermal reaction type resist layer on a sleeve-shaped mold, and exposing using a laser and developing the thermal reaction type resist layer and thereby forming a fine mold pattern, and is characterized in that the thermal reaction type resist layer is comprised of a thermal reaction type resist having a property of reacting in predetermined light intensity or more in a light intensity distribution in a spot diameter of the laser. |
申请公布号 |
EP2246170(B1) |
申请公布日期 |
2017.03.15 |
申请号 |
EP20090704509 |
申请日期 |
2009.01.23 |
申请人 |
ASAHI KASEI KABUSHIKI KAISHA |
发明人 |
SUZUKI, Masaru;MITAMURA, Yoshimichi;MAEDA, Masatoshi |
分类号 |
G03F7/00;B29C33/38;B41C1/05;H01J37/16 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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