发明名称 MANUFACTURING METHOD FOR SEAMLESS MOLD
摘要 A seamless mold manufacturing method of the invention is a seamless mold manufacturing method having the steps of forming a thermal reaction type resist layer on a sleeve-shaped mold, and exposing using a laser and developing the thermal reaction type resist layer and thereby forming a fine mold pattern, and is characterized in that the thermal reaction type resist layer is comprised of a thermal reaction type resist having a property of reacting in predetermined light intensity or more in a light intensity distribution in a spot diameter of the laser.
申请公布号 EP2246170(B1) 申请公布日期 2017.03.15
申请号 EP20090704509 申请日期 2009.01.23
申请人 ASAHI KASEI KABUSHIKI KAISHA 发明人 SUZUKI, Masaru;MITAMURA, Yoshimichi;MAEDA, Masatoshi
分类号 G03F7/00;B29C33/38;B41C1/05;H01J37/16 主分类号 G03F7/00
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