发明名称 半導体加工用テープ
摘要 [Problem] To provide a semiconductor processing tape which has excellent pick-up properties and in which the thermal shrinkage rate in a tape shrinkage process is low, wrinkles do not occur, and kerf width extends sufficiently without displacement of chip position. [Solution] Provided is a semiconductor processing tape that is characterized by having an adhesive tape that is provided with a substrate film and an adhesive layer formed on at least one surface side of the substrate film, wherein in a process for fragmenting an adhesive by expansion, the relationship between the stress on only the substrate and the stress on the adhesive tape when the adhesive tape is subjected to a tensile elongation of 10% according to a method set forth in JIS7162 is: stress on adhesive tape/stress on only substrate = 1 or less.
申请公布号 JP6097893(B2) 申请公布日期 2017.03.15
申请号 JP20160570118 申请日期 2016.03.23
申请人 古河電気工業株式会社 发明人 佐野 透;杉山 二朗;青山 真沙美
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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