| 摘要 |
A single chip push-pull bridge-type magnetic field sensor. The sensor comprises a substrate (1), bonding pads (6-9), magnetoresistance sensing elements (10, 11), and flux concentrators (12, 13), wherein the magnetoresistance sensing elements (10, 11) are positioned in the clearances (14, 15) of the adjacent flux concentrators (12, 13), and the directions of the pinning layers of the magnetoresistance sensing elements (10, 11) are identical. The flux concentrators (12, 13) are divided into a push arm type and a pull arm type, the included angle between one type and an X-axis forward direction is positive, and the included angle between the other type and the X-axis forward direction is negative. The working principle of the sensor is that the magnetic field along the X-axis direction in the clearances (14, 15) of the flux concentrators (12, 13) are oppositely oriented. The sensor has the advantages of small size, low cost, simplicity in manufacturing, high sensitivity, good linearity, high sensitivity, wide working dynamic range, and the like. |
