发明名称 LOW STIFFNESS FLEXURE
摘要 A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.
申请公布号 EP3140563(A1) 申请公布日期 2017.03.15
申请号 EP20150789553 申请日期 2015.04.02
申请人 Mems Drive Inc. 发明人 LIU, Xiaolei;GUTIERREZ, Roman;WANG, Guiqin;MAI, Benson;NG, Matthew
分类号 F16F1/18 主分类号 F16F1/18
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