| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring system capable of improving measurement accuracy and improving throughput.SOLUTION: The three-dimensional measuring device includes: an air fluctuation calculation point light source 50 arranged at a position not relatively changed for a line sensor inside a light collection region of line sensors 25A to 25C; and a storage part 53 for storing a brightness center-of-gravity position of a brightness distribution signal detected by the line sensor based on the light of this light source. The probe calculation part 32, when measuring a work, calculates a difference between the brightness center-of-gravity position of the brightness distribution signal and the brightness center-of-gravity stored in the storage part as an air fluctuation amount on the basis of the light from the air fluctuation calculation point light source, calculates a corrected brightness center-of-gravity position by shifting the air fluctuation amount for the brightness center-of-gravity position of the brightness distribution signal detected by the line sensor based on the light from measurement light sauces (LED 1 to 9), and calculates coordinates of a measurement point light source from this corrected brightness-center-of-gravity position. |
