| 摘要 |
A coating apparatus 1 with which it is possible to cause a film-forming liquid to be coated to a small, uniform film thickness on peripheral edge sections of a substrate that include the end faces, and with which it is possible to stably form a coating film with little variation in film thickness; wherein the apparatus is provided with: a support table 10 for supporting the substrate 2; a coating unit 20 provided with a pair of coating heads 21; a movement unit 40 for moving the coating unit 20; a liquid supply unit 50 for supplying the film-forming liquid 51 to the coating heads 21; and a control unit 70 for controlling the movement unit 40 so that the coating heads 21 are caused to move along the peripheral edge sections of the substrate 2 with the end section of the substrate 2 having been inserted into the gap between the coating heads 21, the application heads 21 being equipped with liquid-storage sections 22a, 23a for storing the film-forming liquid 51, and coating units 22c, 22d, 23c, 23d for applying, as a thin film, the film-forming liquid 51 that has adhered to the end section of the substrate 2 that has passed through the liquid-storage sections 22a, 23a. |
