发明名称 |
Optical filter and sensor system |
摘要 |
An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm. |
申请公布号 |
US9588269(B2) |
申请公布日期 |
2017.03.07 |
申请号 |
US201615158191 |
申请日期 |
2016.05.18 |
申请人 |
Viavi Solutions Inc. |
发明人 |
Hendrix Karen Denise;Bradley, Jr. Richard A.;Grigonis Marius;Ockenfuss Georg J. |
分类号 |
G02B5/28;H04N13/02;H04N5/33;G06K9/00;G01J5/08;G02B1/11;G02B5/20 |
主分类号 |
G02B5/28 |
代理机构 |
Harrity & Harrity, LLP |
代理人 |
Harrity & Harrity, LLP |
主权项 |
1. An optical filter, comprising:
a filter stack comprising:
a plurality of thin film hydrogenated silicon layers, wherein the plurality of thin film hydrogenated silicon layers have a refractive index of greater than 3 over a wavelength range of 800 nm to 1100 nm; anda plurality of thin film dielectric lower-refractive-index layers, wherein the plurality of thin film dielectric lower-refractive-index layers have a refractive index of less than 3 over the wavelength range of 800 nm to 1100 nm, and wherein the plurality of thin film dielectric lower-refractive-index layers alternate, in a one-to-one ratio, with the plurality of thin film hydrogenated silicon layers; and wherein the optical filter has exhibits interference that creates a passband at least partially overlapping with the wavelength range of 800 nm to 1100 nm,
wherein the passband has a center wavelength that shifts by less than 20 nm in magnitude with a change in an incidence angle between 0° to 30°. |
地址 |
Milpitas CA US |