Gas laser oscillation device

摘要

A gas laser oscillation device includes a discharge part, a blower part, and a laser gas path. The discharge part excites a laser gas medium and the blower part blows the laser gas. The laser gas path forms the circulation path of the laser gas between the discharge part and the blower part. The blower part includes an impeller section, a drive section, and an intermediate chamber disposed between the impeller section and the drive section. In the impeller section, a rotating blade to be rotated by a drive section via a rotating shaft is disposed. In the intermediate chamber, a main space and a gas damper space are partially partitioned by a gas shielding member.

主权项

1. A gas laser oscillation device comprising:
a discharge part for exciting laser gas; a blower part for blowing the laser gas; and a laser gas path forming a circulation path of the laser gas between the discharge part and the blower part, wherein the blower part includes an impeller section, a drive section, and an intermediate chamber disposed between the impeller section and the drive section, in the impeller section, a rotating blade to be rotated by the drive section via a rotating shaft is disposed, in the intermediate chamber, a main space and a gas damper space are partially partitioned by a gas shielding member, and the gas damper space is disposed so as to surround the main space in a plane perpendicular to the rotating shaft.