CONDUCTIVE OXIDE FILM, DISPLAY DEVICE, AND METHOD FOR FORMING CONDUCTIVE OXIDE FILM

摘要

One embodiment of the present invention provides a conductive oxide film having high conductivity and high transmittance of visible light. The conductive oxide film having high conductivity and high transmittance of visible light can be obtained by forming a conductive oxide film at a high substrate temperature in the film formation and subjecting the conductive oxide film to nitrogen annealing treatment. The conductive oxide film has a crystal structure in which c-axes are aligned in a direction perpendicular to a surface of the film.

主权项

1. A method for forming a conductive oxide film comprising the steps of:
forming a conductive oxide film over a substrate by a sputtering method at a substrate temperature of 200° C. or higher; and performing nitrogen annealing treatment on the conductive oxide film.