发明名称 SCANNING MICROSCOPE
摘要 A scanning microscope includes: a varifocal lens that scans an object in an optical-axis direction of an objective; a scanner that scans the object in a direction orthogonal to the optical axis of the objective; and a controller configured to control the varifocal lens and the scanner.
申请公布号 US2017059840(A1) 申请公布日期 2017.03.02
申请号 US201615230213 申请日期 2016.08.05
申请人 OLYMPUS CORPORATION 发明人 TAMANO Shingo
分类号 G02B21/00;G02B27/00;G02B21/02 主分类号 G02B21/00
代理机构 代理人
主权项 1. A scanning microscope comprising: a varifocal lens configured to scan an object in an optical-axis direction of an objective; a scanner configured to scan the object in a direction orthogonal to the optical axis of the objective; and a controller configured to control the varifocal lens and the scanner, wherein the controller is configured to control the scanner according to scan control data for correcting deviation of a scan position that is caused by the varifocal lens.
地址 Tokyo JP