发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment a semiconductor memory device includes a first stacked body, a pillar, a memory film, a capacitive element, a first wiring, and a second wiring. The capacitive element includes a first conductive member and a second conductive member. A first length of the first conductive member in a first direction is larger than a second length of the first conductive member in a second direction crossing the first direction. A third length of the first conductive member in a third direction crossing the first direction and the second direction is larger than the second length. A fourth length of the second conductive member in the first direction is larger than a fifth length of the second conductive member in the second direction. A sixth length of the second conductive member in the third direction is larger than the fifth length.
申请公布号 US2017062461(A1) 申请公布日期 2017.03.02
申请号 US201615010623 申请日期 2016.01.29
申请人 Kabushiki Kaisha Toshiba 发明人 TAKAMATSU Tomohiro
分类号 H01L27/115;H01L49/02 主分类号 H01L27/115
代理机构 代理人
主权项 1. A semiconductor memory device comprising: a first stacked body including a plurality of conductive layers arranged along a first direction; a pillar extending through the first stacked body in the first direction; a memory film provided between the pillar and the first stacked body; a capacitive element including a first conductive member and a second conductive member, and the capacitive element being arranged in a line with the pillar in a direction crossing the first direction; a first wiring electrically connected to the first conductive member; and a second wiring electrically connected to the second conductive member, a first length of the first conductive member in the first direction being longer than a second length of the first conductive member in a second direction crossing the first direction, a third length of the first conductive member in a third direction being longer than the second length, and the first length being longer than a length of the first stacked body in the first direction, the third direction crossing the first direction and the second direction, and a fourth length of the second conductive member in the first direction being longer than a fifth length of the second conductive member in the second direction, a sixth length of the second conductive member in the third direction being longer than the fifth length, and the fourth length being longer than a length of the first stacked body in the first direction.
地址 Minato-ku JP