| 摘要 |
Provided are a composite single crystal thin film and a method for manufacturing the composite single crystal thin film. The composite single crystal thin film comprises: a substrate; an optical isolation layer, which is located on the substrate; a lithium niobate single crystal thin film or a lithium tantalate single crystal thin film, which is located on the optical isolation layer; and a silicon thin film, which is located on the lithium niobate single crystal thin film or the lithium tantalate single crystal thin film. The composite single crystal thin film has a good nonlinear optical effect, acousto-optical effect, electro-optical effect and the like of a lithium niobate or lithium tantalate material, and at the same time, also has the properties of a mature processing technology for silicon materials, so that the composite single crystal thin film can achieve a better compatibility with an existing IC production technology and has a very broad industrial prospect. In addition, stable and effective industrial production can be achieved by means of the method for manufacturing the composite single crystal thin film. |
