PHYSICAL QUANTITY SENSOR

摘要

A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.

主权项

1. A physical quantity sensor, comprising:
an acceleration sensor provided with a sensing portion outputting a sensor signal corresponding to acceleration; an angular velocity sensor provided with a sensing portion having an oscillating body that oscillates in a predetermined direction, the sensing portion outputting a sensor signal corresponding to an angular velocity from the sensing portion, at least one of the acceleration sensor and the angular velocity sensor being of a package structure, in which a cap portion is arranged in a sensor portion where the sensing portion is formed and the sensing portion is hermetically sealed in an airtight chamber defined between the sensor portion and the cap portion; a case having a housing space set to a predetermined pressure and housing the acceleration sensor and the angular velocity sensor in the housing space; a detection unit outputting a detection signal corresponding to an oscillation of the oscillating body in the angular velocity sensor; and a self-diagnostic unit self-diagnosing a detection environment of the angular velocity sensor on a basis of the detection signal outputted by the detection unit, wherein the acceleration sensor is of the package structure and the airtight chamber is set to an atmospheric pressure, and the housing space is set to a vacuum pressure.