| 发明名称 |
METHOD FOR MANUFACTURING A MEMS ELEMENT |
| 摘要 |
A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed. |
| 申请公布号 |
US2017059321(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201615253345 |
申请日期 |
2016.08.31 |
| 申请人 |
Robert Bosch GmbH |
发明人 |
BRAEUER Joerg;HOEPPNER Christian;TEBJE Lars |
| 分类号 |
G01C19/5712;B81C1/00;B81B3/00 |
主分类号 |
G01C19/5712 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for manufacturing a MEMS component, the method comprising:
forming a least one stationary weight element and at least one moving weight element in a MEMS element; and positioning at least one fixing element at the stationary weight element and at the moving weight element; wherein the fixing element is formed so as to be splittable. |
| 地址 |
Stuttgart DE |
