发明名称 |
RETAINING RING HAVING INNER SURFACES WITH FACETS |
摘要 |
A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners. |
申请公布号 |
EP3134915(A1) |
申请公布日期 |
2017.03.01 |
申请号 |
EP20150783681 |
申请日期 |
2015.04.15 |
申请人 |
Applied Materials, Inc. |
发明人 |
OH, Jeonghoon;ZUNIGA, Steven M.;NAGENGAST, Andrew J.;HSU, Samuel Chu-Chiang;DANDAVATE, Gautam Shashank |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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