发明名称 Asymmetric finFET memory access transistor
摘要 A field effect transistor device comprises a semiconductor substrate, a doped source layer arranged on the semiconductor substrate, an insulator layer arranged on the doped source layer, a fin arranged on the insulator layer, a source region extension portion extending from the doped source layer and through the fin, a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion, a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.
申请公布号 US9583624(B1) 申请公布日期 2017.02.28
申请号 US201514865276 申请日期 2015.09.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 Lam Chung H.;Lin Chung-hsun;Lu Darsen D.;Oldiges Philip J.
分类号 H01L21/70;H01L29/78;H01L29/66 主分类号 H01L21/70
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP ;Alexanian Vazken
主权项 1. A field effect transistor device, comprising: a semiconductor substrate; a doped source layer arranged on the semiconductor substrate; an insulator layer arranged on the doped source layer; a fin arranged on the insulator layer; a source region extension portion extending from the doped source layer and through the fin; a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion; a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration.
地址 Armonk NY US