发明名称 |
Asymmetric finFET memory access transistor |
摘要 |
A field effect transistor device comprises a semiconductor substrate, a doped source layer arranged on the semiconductor substrate, an insulator layer arranged on the doped source layer, a fin arranged on the insulator layer, a source region extension portion extending from the doped source layer and through the fin, a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion, a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration. |
申请公布号 |
US9583624(B1) |
申请公布日期 |
2017.02.28 |
申请号 |
US201514865276 |
申请日期 |
2015.09.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
Lam Chung H.;Lin Chung-hsun;Lu Darsen D.;Oldiges Philip J. |
分类号 |
H01L21/70;H01L29/78;H01L29/66 |
主分类号 |
H01L21/70 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP ;Alexanian Vazken |
主权项 |
1. A field effect transistor device, comprising:
a semiconductor substrate; a doped source layer arranged on the semiconductor substrate; an insulator layer arranged on the doped source layer; a fin arranged on the insulator layer; a source region extension portion extending from the doped source layer and through the fin; a gate stack arranged over a channel region of the fin and adjacent to the source region extension portion; a drain region arranged on the fin adjacent to the gate stack; the drain region having a graduated doping concentration. |
地址 |
Armonk NY US |