Micromechanical digital loudspeaker

摘要

A digital loudspeaker and a method for operating a digital loudspeaker are disclosed. In an embodiment a digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.

主权项

1. A digital loudspeaker comprising:
a substrate; a first stator fixed with respect to the substrate; a second stator fixed with respect to the substrate and spaced at a distance from the first stator; and a membrane between the first stator and the second stator, the membrane comprising a displaceable portion being displaceable between a first operation position in which the displaceable portion of the membrane mechanically contacts the first stator, and a second operation position in which the displaceable portion of the membrane mechanically contacts the second stator, wherein the first stator and the second stator are arranged to electrostatically move the displaceable portion of the membrane from a rest position spaced apart from the first operation position and the second operation position to the first operation position and the second operation position, respectively, wherein the membrane comprises a corrugation groove configured to facilitate a deflection of the membrane to the first operation position and the second operation position, the corrugation groove comprising a first edge and a second edge, and wherein the first edge and the second edge are arranged at a deflectable portion of the membrane, wherein the corrugation groove continuously encloses an area of the membrane.