Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type

摘要

An arrangement for cooling a plasma-based radiation source with a metal cooling liquid and a method for starting up a cooling arrangement of this type has a pump unit for conveying the metal cooling liquid from a reservoir to an immersion bath in a pipe portion that is connected to the reservoir in the conveying direction of the cooling circuit has at least one pump for conveying the metal cooling liquid through an external field effect of the at least one pump. A control unit for controlling the at least one pump controls the at least one pump at least temporarily in a pumping direction opposite to the conveying direction of the cooling circuit in order to generate a heating effect through external field effect on metal cooling liquid located in the pipe portion.

主权项

1. An arrangement for cooling a plasma-based radiation source with a metal cooling liquid comprising:
a revolving element to be cooled; an immersion bath comprising the metal cooling liquid in which the revolving element is at least partially immersed; a cooling circuit coupled to the immersion bath and comprising a reservoir for receiving a minimum volume of the metal cooling liquid; means for maintaining the metal cooling liquid above a melting temperature, and at least one temperature sensor for monitoring a temperature of the metal cooling liquid; and a pump unit for circulating the metal cooling liquid in the cooling circuit from the reservoir to the immersion bath, the pump unit being arranged in a pipe portion connected to the reservoir in a conveying direction of the cooling circuit, the pump unit comprising at least one pump in the pipe portion for conveying the metal cooling liquid through an external electromagnetic field of the at least one pump, and in that a control unit is provided for controlling the at least one pump, the control unit operating the at least one pump at least temporarily in a pumping direction opposite to the conveying direction of the cooling circuit for generating a heating effect in the metal cooling liquid located in the pipe portion against a flow resistance of the metal cooling liquid in the pipe portion affected by the external electromagnetic field.