PLASMA GENERATOR AND METHOD FOR SETTING AN IONIC RATIO

摘要

The present invention relates to a plasma generator (1) which has a piezoelectric transformer (2) which is suitable for ionizing a process gas, an ion separation electrode (7) and a drive circuit (8) which is suitable for applying a potential to the ion separation electrode (7). The invention further relates to a method for setting the ratio of positive to negative ions in a plasma which is generated by a plasma generator (1).