发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR
摘要 A semiconductor device includes a semiconductor substrate, a stress generation source that is provided on the semiconductor substrate and generates stress in the semiconductor substrate, and a first field-effect transistor and a second field-effect transistor provided on the semiconductor substrate. The first field-effect transistor and the semiconductor substrate are disposed such that channel directions from a source toward a drain are different from each other in response to positions with respect to the stress generation source.
申请公布号 US2017053914(A1) 申请公布日期 2017.02.23
申请号 US201615193842 申请日期 2016.06.27
申请人 FUJITSU LIMITED 发明人 TASHIRO Hiroko;ISHITSUKA Takeshi
分类号 H01L27/092;H01L21/8238;H01L21/768;H01L29/78;H01L23/535 主分类号 H01L27/092
代理机构 代理人
主权项 1. A semiconductor device, comprising: a semiconductor substrate; a stress generation source that is provided on the semiconductor substrate and generates stress in the semiconductor substrate; and a first field-effect transistor and a second field-effect transistor provided on the semiconductor substrate; wherein the first field-effect transistor and the semiconductor substrate are disposed such that channel directions from a source toward a drain are different from each other in response to positions with respect to the stress generation source.
地址 Kawasaki-shi JP