TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING MEDIUM HAVING TARGET MATERIAL REFINING PROGRAM RECORDED THEREIN, AND TARGET GENERATOR

摘要

A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.

主权项

1. A target supply device comprising:
a tank configured to contain target material of metal; a nozzle having a nozzle hole configured to output the target material from the tank; a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole; a temperature adjuster configured to change temperature of the target material in the tank; and a controller configured to control the temperature adjuster to change the temperature of the target material in the tank so as to cause oxygen in the target material to precipitate as metal oxide.