发明名称 FERROELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM-COATED SUBSTRATE, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER
摘要 This ferroelectric thin film comprises lead zirconate titanate niobate. In said ferroelectric thin film, the ratio (a) of number of moles of lead to the total number of moles of zirconium, titanium, and niobium is greater than or equal to 100%; the ratio (b) of the number of moles of niobium to the total number of moles of zirconium, titanium, and niobium is between 10% and 20%, inclusive; and the ratio (c) of the number of moles of zirconium to the total number of moles of zirconium and titanium is between 52% and 59%, inclusive. The film stress exhibited by the ferroelectric thin film is between 100 and 250 MPa, inclusive.
申请公布号 US2017050439(A1) 申请公布日期 2017.02.23
申请号 US201515308489 申请日期 2015.04.27
申请人 Konica Minolta, Inc. 发明人 MAWATARI Kenji
分类号 B41J2/14;H01L41/18;H01L41/08 主分类号 B41J2/14
代理机构 代理人
主权项 1. A ferroelectric thin film comprising lead niobate titanate zirconate, wherein a ratio “a” of lead to a sum of zirconium, titanium, and niobium is 100% or more by mol ratio, a ratio “b” of niobium to the sum of zirconium, titanium, and niobium is 10% or more but 20% or less by mol ratio, a ratio “c” of zirconium to a sum of zirconium and titanium is 52% or more but 59% or less by mol ratio, and a film stress is 100 MPa or more but 250 MPa or less.
地址 Tokyo JP
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