发明名称 |
DIGITAL MICROMIRROR DEVICE CONTROLLER AND EXPOSURE IMAGE OUTPUT PROCESSING METHOD OF SAME |
摘要 |
Embodiments relate to a digital micromirror device (DMD) controller and an exposure image output processing method of same. The DMD controller comprises: a storage unit for storing an image for exposure which is received from a managing controller; a main control unit for controlling the overall output processing of a digital micromirror device for the exposure image; and an exposure image manager which, under the control of the main control unit, moves the image for exposure in response to a change in the position of the exposure stage according to a trigger signal of a sink controller, and outputs an exposure image through a DMD. The image for exposure is generated as a virtual frame for which the exposure stage or a mask film is virtualized in a memory and modelled as a memory bit cell at a resolution to be realized. The exposure image manager uses the generated virtual frame as the image for exposure and processes the output of the exposure image. A detailed, fine pattern is realized on a display device having a certain pixel size, and even real-time synchronization between the exposure stage and the image for exposure is realized. |
申请公布号 |
WO2017030318(A1) |
申请公布日期 |
2017.02.23 |
申请号 |
WO2016KR08812 |
申请日期 |
2016.08.10 |
申请人 |
SDA CO., LTD |
发明人 |
IM, Chang Min;SIM, Sang Bum;MOON, Young Soung |
分类号 |
G03F7/20;G03F1/76;G03F9/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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