| 摘要 |
A gas sensing device 10 comprises a dielectric substrate 16, a heater 18 integrated into the substrate, an insulating dielectric 12 formed over the heater, a gas sensing layer 14, contacts 26 formed on the sensing layer, and a noble material 24 formed on a portion of the sensing layer between the contacts to act as an ionising catalyst such that upon heating to a temperature adsorption of a specific gas changes electronic properties of the sensing layer to permit detection of the gas. The device may have a plurality of different noble metals 24 to sense different gases. A calibration system includes a gas sensing device mounted on a substrate, a gas canister for storing a calibration gas and an injector for enabling local gas release for calibrating the sensor. |
