发明名称 ヘテロエピタキシャルPN接合酸化物薄膜を有する積層薄膜
摘要 Semiconductors of different types are formed by a crystal growth technique and joined at the interface at which rapid atomic-layer-level compositional changes occur while maintaining high crystallinity of the semiconductor layers so as to form a heterogeneous PN junction. A layered film that includes a PN junction oxide thin film is formed on a single crystal substrate. The PN junction oxide thin film is constituted by an N-type semiconductor oxide thin film and a P-type semiconductor oxide thin film that are epitaxially grown to have c-axis orientation represented by (00k).
申请公布号 JP6083262(B2) 申请公布日期 2017.02.22
申请号 JP20130042073 申请日期 2013.03.04
申请人 TDK株式会社 发明人 前川 和也;上田 国博
分类号 H01L21/363;C23C14/08;H01L21/20 主分类号 H01L21/363
代理机构 代理人
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