Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method

摘要

An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve, and a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.

主权项

1. A lithographic apparatus comprising:
a carbon dioxide supply system to provide carbon dioxide from a source to a first gas outlet; a fluid handling system to provide a liquid to a space between a final element of a projection system and a facing surface and having the first gas outlet to supply a gas flow radially outward of a meniscus of liquid in the space; a second gas outlet radially outward of the first gas outlet to supply a flow of temperature conditioned gas, separate from the carbon dioxide supply, onto an object; and a control system comprising a sensor to detect flow and/or pressure at or upstream of the second gas outlet, the control system configured to stop the supply of the gas flow radially outward of the meniscus of liquid if a signal from the sensor indicates that flow and/or pressure at or upstream of the second gas outlet is below a certain magnitude.