Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide film

摘要

The present method of forming a metal oxide film can increase production efficiency while maintaining the low resistance of the metal oxide film. The present method of forming a metal oxide film includes first misting a solution containing a metallic element and ethylenediamine; meanwhile, heating a substrate; and then, supplying the misted solution onto a first main surface of the substrate.

主权项

1. A method of forming a metal oxide film with a desired mobility, the method comprising:
supplying a misted solution comprising a metallic element and an amount of ethylenediamine sufficient to provide the desired mobility onto a first main surface of a substrate while heating the substrate, wherein
the amount of ethylenediamine is determined from a relationship showing change in mobility of the metal oxide film with a changing ethylenediamine amount but no significant change in carrier concentration of the metal oxide film with the changing ethylenediamine amount.