Method for analyzing the RF performance of a probe card, detector assembly and system for analyzing the RF performance of a probe card

摘要

A system for analyzing a probe card comprises a signal generator adapted to generate a radio frequency test signal. a connector for inputting into the probe card the radio frequency test signal, and a detector assembly. The detector assembly comprises an RF chuck for receiving a radio frequency signal from the probe card, and a sensor configured to receive the radio frequency signal from the RF chuck. The sensor is configured to measure a magnitude of the radio frequency signal and to output a measurement signal that represents only the magnitude of the radio frequency signal. The RF chuck and the sensor are mechanically coupled.

主权项

1. A method, performed by a system, of analyzing a probe card, comprising:
inputting into the probe card a radio frequency test signal; receiving from the probe card a transmitted signal in response to the inputted radio frequency test signal, the transmitted signal comprising a magnitude and a phase; measuring the magnitude of the transmitted signal, and outputting a measurement signal that represents only the magnitude of the transmitted signal.