Semiconductor devices and methods of forming same

摘要

Embodiments of the present disclosure include a semiconductor device and methods of forming the same. An embodiment is a method for of forming a semiconductor device, the method including forming a first conductive feature over a substrate, forming a dielectric layer over the conductive feature, and forming an opening through the dielectric layer to the first conductive feature. The method further includes selectively forming a first capping layer over the first conductive feature in the opening, and forming a second conductive feature on the first capping layer.

主权项

1. A method of forming a semiconductor device, the method comprising:
forming a first conductive feature over a substrate; forming a dielectric layer over the first conductive feature; forming an opening through the dielectric layer to the first conductive feature, wherein a first lateral extent of the opening substantially adjoins a second lateral extent of the first conductive feature; before forming a barrier layer on sidewalls of the opening, forming a first capping layer over the first conductive feature in the opening, wherein forming the first capping layer comprises selectively depositing a first material that has a lower surface activation energy for binding to the first conductive feature than for binding to the dielectric layer, wherein the first material is disposed on the first conductive feature and is not substantially disposed on sidewall surfaces of the opening above an upper-most surface of the first capping layer; after forming the first capping layer, forming the barrier layer on sidewall surfaces of the opening above the upper-most surface of the first capping layer; and after forming the barrier layer, forming a second conductive feature on the first capping layer, wherein the first material is different from a second material used to form the second conductive feature.