Method of forming an image pickup device having two waveguides and a light-shielding member

摘要

A solid-state image pickup device includes a semiconductor substrate in which photoelectric conversion units are arranged. An insulator is disposed on the semiconductor substrate. The insulator has holes associated with the respective photoelectric conversion units. Members are arranged in the respective holes. A light-shielding member is disposed on the opposite side of one of the members from the semiconductor substrate, such that only the associated photoelectric conversion unit is shielded from light. In the solid-state image pickup device, the holes are simultaneously formed and the members are simultaneously formed.

主权项

1. A method of making a solid-state image pickup device, comprising:
preparing a substrate having a first photoelectric conversion unit and a second photoelectric conversion unit; forming a structure on the semiconductor substrate, the structure including a first insulating layer, a second insulating layer arranged between the first insulating layer and the substrate, a first interconnect layer arranged between the second insulating layer and the substrate, and a second interconnect layer arranged between the first insulating layer and the second insulating layer; forming a first hole and a second hole in the structure so that the first hole is arranged on the first photoelectric conversion unit and the second hole is arranged on the second photoelectric conversion unit by etching the first insulating layer and the second insulating layer; forming a first portion in the first hole and a second portion in the second hole in a parallel manner by putting a first material in the first hole and the second hole, after forming the first hole and the second hole in the structure; forming a first film having a first part that covers the first portion and a second part that covers the second portion, the first film comprising a second material different from the first material; forming a light shielding member that covers the second portion so that the second part is arranged between the light shielding member and the second portion; and forming a second film that covers the light shielding member so that the first part is arranged between the second film and the first portion.