MEMS optical sensor

摘要

The present invention relates to an all-optical sensor utilizing effective index modulation of a waveguide and detection of a wavelength shift of reflected light and a force sensing system accommodating said optical sensor. One embodiment of the invention relates to a sensor system comprising at least one multimode light source, one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector, at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more multimode sensor optical waveguides, a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguides, and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light.

主权项

1. An optical sensor comprising a sensor chip, the sensor chip comprising:
a hollow core waveguide defining a hollow core and comprising at least one distributed Bragg reflector, at least one solid core waveguide adjacent the hollow core waveguide, each waveguide of the at least one solid core waveguide being configured as a respective coupling element to couple light at least one of into and out of the hollow core of the hollow core waveguide, and at least one deflecting element configured to change at least one of geometry and dimension of the hollow core waveguide when submitted to a force.