发明名称 |
METHODS AND SYSTEMS FOR GENERATING PROCESS GASES |
摘要 |
Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications. |
申请公布号 |
WO2017027581(A1) |
申请公布日期 |
2017.02.16 |
申请号 |
WO2016US46334 |
申请日期 |
2016.08.10 |
申请人 |
RASIRC, INC. |
发明人 |
SPIEGELMAN, Jeffrey;SHEPHERD, Douglas;HOLMES, Russell, J.;SHAMSI, Zohreh |
分类号 |
C23C16/448 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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