METHOD FOR MANUFACTURING PIEZOELECTRIC THIN-FILM ELEMENT

摘要

In order to be able to improve the Q value of a piezoelectric thin-film element once unnecessary vibration has been suppressed, an acoustic reflection film (104) is affixed to a first electrode (102), whereupon a piezoelectric single-crystal substrate (101) is reduced in thickness by polishing from the other surface (101b) of the piezoelectric single-crystal substrate (101), so that the first electrode (102) and a piezoelectric thin film (105) are laminated on the acoustic reflection film (104). The pressure on the surface (101b) during polishing (the polishing pressure) differs between an electrode forming region where the first electrode (102) is formed and the surrounding regions where no electrode is formed, in polishing. As a result, the electrode forming region where the first electrode (102) is formed for the piezoelectric thin film (105) is formed thinner than the surrounding regions where no electrode is formed.