发明名称 |
SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING |
摘要 |
A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure. |
申请公布号 |
US2017045709(A1) |
申请公布日期 |
2017.02.16 |
申请号 |
US201615195156 |
申请日期 |
2016.06.28 |
申请人 |
GSI Group Corporation |
发明人 |
Brown David C. |
分类号 |
G02B7/182;C23F1/30;G02B26/10 |
主分类号 |
G02B7/182 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, wherein said mirror substrate includes a beryllium mirror structure, and wherein said method includes the step of drawing the beryllium mirror structure from a fluid etching agent at a controlled rate such that the at least one wall section forms a tapered wall. |
地址 |
Bedford MA US |