发明名称 SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING
摘要 A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.
申请公布号 US2017045709(A1) 申请公布日期 2017.02.16
申请号 US201615195156 申请日期 2016.06.28
申请人 GSI Group Corporation 发明人 Brown David C.
分类号 G02B7/182;C23F1/30;G02B26/10 主分类号 G02B7/182
代理机构 代理人
主权项 1. A method of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, wherein said mirror substrate includes a beryllium mirror structure, and wherein said method includes the step of drawing the beryllium mirror structure from a fluid etching agent at a controlled rate such that the at least one wall section forms a tapered wall.
地址 Bedford MA US