| 摘要 |
Disclosed is a crucible replacement device, comprising: a base (1), a first mechanical arm (2) and a second mechanical arm (3). The first mechanical arm (2) and the second mechanical arm (3) are arranged on the base (1) respectively, and perform turning and lifting actions synchronously with the base (1). An end of the first mechanical arm (2) is used for grabbing a crucible (4) to be replaced. An end of the second mechanical arm (3) is used for carrying and placing a backup crucible (5). Further disclosed is an evaporation system comprising an evaporation chamber and the crucible replacement device. The crucible replacement device is located within the evaporation chamber. A plurality of evaporation sources are arranged within the evaporation chamber. At least one of the evaporation sources is provided with the crucible (4) to be replaced. |
