ACCELEROMETERS

摘要

A capacitive accelerometer (202) comprises: a substantially planar proof mass (204) mounted to a fixed substrate by flexible support legs (250) so as to be linearly moveable in an in-plane sensing direction (200). The proof mass comprises first and second sets of moveable capacitive electrode fingers. First and second sets of fixed capacitive electrode fingers interdigitates with the first and second sets of moveable electrode fingers respectively (221, 222). A set of moveable damping fingers (224) extend from the proof mass substantially perpendicular to the sensing direction, laterally spaced in the sensing direction. A set of fixed damping fingers (222) mounted to the fixed substrate interdigitates with the set of moveable damping fingers and comprises an electrical connection (260) to the proof mass so that the interdigitated damping fingers (228, 230) are electrically common. The damping fingers are mounted in a gaseous medium that provides a damping effect.