发明名称 スート法に従って合成石英ガラスを製造する方法
摘要 A known method for producing synthetic quartz glass comprises the method steps of: forming a stream of a SiO2 feedstock material which contains octamethylcyclotetrasiloxane (D4) as the main component which has a reference molecular mass assigned to it, feeding the stream to a reaction zone in which the feedstock material is converted under formation of amorphous SiO2 particles by pyrolysis or hydrolysis into SiO2, depositing the amorphous SiO2 particles on a deposition surface while forming a porous SiO2 soot body, and vitrifying the SiO2 soot body while forming the synthetic quartz glass. Starting therefrom, to enable the production of large-volume cylindrical soot bodies with outer diameters of more than 300 mm of improved material homogeneity, it is suggested according to the invention that the feedstock material contains additional components in the form of further polyalkylsiloxanes, wherein light polyalkylsiloxanes with a relative molecular mass of less than the reference molecular mass are contained with a weight fraction of at least 50 ppm, and heavy polyalkylsiloxanes with a relative molecular mass of more than the reference molecular mass are contained with a weight fraction of at least 30 ppm.
申请公布号 JP6080861(B2) 申请公布日期 2017.02.15
申请号 JP20140542829 申请日期 2012.11.22
申请人 ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトHeraeus Quarzglas GmbH & Co. KG 发明人 ハインツ ファビアン;ユルゲン レーパー
分类号 C03B8/04;C03B37/018 主分类号 C03B8/04
代理机构 代理人
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