Dust removing device and dust removing method

摘要

In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.

主权项

1. A dust removing device, comprising:
a piezoelectric device in a form of a plate including a piezoelectric material in a form of a plate and a pair of planar electrodes disposed to be opposed to each other on surfaces of said piezoelectric material; and a vibrating plate, wherein a first planar electrode of said pair of planar electrodes is bonded to a plate surface of said vibrating plate, wherein said piezoelectric material is polarized parallel to a plane of said first planar electrode or in a direction inclined by not more than 10° with respect to the plane of said first planar electrode, wherein a second planar electrode of said pair of planar electrodes is for fixing to a base, and wherein said piezoelectric device generates a thickness-shear vibration for displacing said first planar electrode and said second planar electrode from each other.