FREMGANGSMÅDE TIL FREMSTILLING AF SILICIUM-ENKELTKRYSTAL, APPARAT TIL STYRING AF FREMSTILLINGEN AF SILICIUM-ENKELTKRYSTAL, OG PROGRAM

摘要

According to a method of manufacturing a silicon monocrystal by FZ method, a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material (6). While impurities whose conductivity type is the same as that of the raw material (6) are supplied by a gas doping method, the raw material (6) is recrystallized by an induction-heating coil (3) for obtaining a product-monocrystal (8).